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New master student on board

We welcome Marcel Schmickler joining our IMC team as a new Master student. He will be working on synthesis and characterization of lanthanide precursors. We wish him a productive research stay!

Congratulations to Anjana

The Royal Society of Chemistry (RSC) journal “Dalton Transactions” has nominated Anjana to the Editorial Advisory Board effective from January 2021 in recognition of her contributions towards the research areas of Inorganic and Materials Chemistry. A further motivation for all of us! The IMC team wishes her more success in her future research career!

Santa brought a present for Anjana

Thanks to my “Kindergarten” for the beautiful Christmas gift. You guys are my motivation to carry on doing high-quality research! Keep up the spirit!

New Cover page

Check out our new cover feature in Chem. Eur. J. designed by our PhD student Parmish Kaur which demonstrates a water assisted ALD process of CeO2 thin films. The background picture was taken by herself during a flight. The paper is a successful outcome of the EU-ITN-HYCOAT project collaborating with Tyndall National institute (Ireland), Aalto […]

Merry Christmas and a Happy New Year!

What a year! So far, our group was lucky dodging the Corona virus and everybody is healthy which is most important. Despite the challenging situation in terms of organizing and mastering lab work and home office, we had a successful year 2020. We especially would like to thank all our cooperation partners for the fruitful […]

New cover page in ChemComm

Check out our new cover page with the red tail of the comet “Neowise” (C/2020 F3) photographed by our PhD student Nils Boysen this summer. If you are interested in the story behind this fancy image, just click on the cover page to be redirected to the article about the spatial ALD of conducting copper […]

New in-depth student on board

Jorit Obenlünenschloß has recently found his way to the IMC Group. Together with David, he works on the synthesis of novel cobalt(II) precursors for CVD/ALD applications and conducts fundamental reactivity studies to elucidate mechanisms behind ALD thin film formation. We are happy to have you with us Jorit! Which cobalt(II) complex has the nicest color?

PhD Defense of Lukas

Today, Lukas Mai successfully defended his PhD thesis. Of course, due to the CoVid-19 situation, the disputation was held in the frame of an online zoom conference. As expected, Lukas delivered a rock-solid talk about his studies during his PhD project. In total, 14 publications as well as his innovative ideas in precursor chemistry and […]

New cover page

Check out our new “Sci-Fi” cover page designed by our PhD student Niklas Huster. If you are interested in the story behind this fancy image, just click on the cover page to be redirected to the article about additive-free spin-coating of SnO2.

New bachelor student

We welcome our new bachelor student Isabell Arentz who will perform her bachelor theses in our research group within the summer term. Isabell will focus on the synthesis and characterization of coinage metal precursors for CVD and ALD. We wish her all the best for her studies!

New chemistry for ultra-thin gas sensors

Our group member Lukas Mai recently published his work on PEALD ZnO thin films for gas sensing applications in the renowned Journal Small. Now, his studies are highlighted and summarized in a press release article of our university! Click here to be redirected to the English version of the article. Für die deutsche RUB Pressemitteilung […]

Nickel oxide thin films for oxygen evolution reaction

Congratulations! Dennis’ recent research work on Ni β-ketoiminates is published in Inorganic Chemistry. Apart from developing a new class of Ni precursors, NiO thin films were grown via CVD and its assessment in electrocatalysis revealed promising activity for oxygen evolution reactions (OER). Another fruitful collaboration with Dr. Dereje Taffa and Prof. Michael Wark from the […]

Cover page in Small

Our Master student Florian is not only working in the lab – He designed the cover page for the journal Small! Check out the creative and fancy artwork that he created illustrating the sensing behavior of Zinc Oxide layers fabricated via PEALD using a non-pyrophoric zinc precursor. For more details click on the cover which […]

An unusual cobalt compound

Interested in Co precursor chemistry? David developed a novel, rather unusual Co complex with a spin configuration of 1/2 which could be of interest for future battery technology. These exciting news were recently highlighted in a RUB press release! The articles are available in both German and English language: RUB press release RUB Pressemitteilung

Finnische Universität zeichnet Anjana Devi aus

Unsere Arbeitsgruppenleiterin Anjana Devi wurde kürzlich mit der Ehrendoktorwürde der Aalto Universität aus Finnland ausgezeichnet. Ausschlaggebend für die Ehrung ist ihre führende Position im Bereich der Präkursoren- und Dünnschichtentwicklung sowie ihr jahrelanges Engagement im Bereich der Vernetzung der ALD und CVD Gemeinschaft. Deine Arbeitsgruppe ist stolz auf deine Leistung und wir dürfen dich nun Prof. […]

Honorary Doctor of Science in Technology award for Anjana

“Hard work always pays off…” These words have always been a great motivation for our group leader Anjana. Today, Aalto University (Finland) cherished this attitude and awarded her with the honorary doctorate of technology 2020 for her leading role in ALD and her contribution in bringing the ALD and CVD research communities together. With this […]

David is back in Bochum with the IMC Group again!

Group photo of the BarryLab members (fall 2019). After a fruitful and synthesis-loaded research stay in the BarryLab at Carleton University (Ottawa, CA), David has returned safe and sound. Based on the first stint of his binational Cotutelle Program between RUB and Carleton, David has spent half a year abroad to study unusual cobalt complexes […]

New paper published in Small

We have a new paper published in Small. This research topic led from the front by Lukas focused on a complete process chain starting from designing a Zn precursor, optimizing a PEALD processfor high-quality nanostructured ZnO followed by the application of the resulting ZnO thin films for dual applications. This includes its function as gas […]

Coronavirus situation at RUB

In view of the issues related to the Coronavirus pandemie we have been asked by the RUB authorities to close our labs and offices effective from 18.3.2020 as a precautionary measure. If you need to contact us, please send an email to Anjana Devi or the IMC administation.

VIP Prof. Erwin Kessels at RUB

Prof. Erwin Kessels who is the Chair of Plasma and Materials Processing (PMP) group at the Eindhoven University of Technology (TU/e) has been recently appointed as a Visiting International Professor (VIP) at the Ruhr University Bochum within the framework of the RUB Research School activities. The Inorganic Materials Chemistry (IMC) group is hosting him and […]

ALD Academy Workshop in Eindhoven

Jan-Lucas, Niklas, Jean-Pierre and Florian attended the ALD Academy Workshop that was hosted at the Eindhoven University of Technology (TU/e) on January 14th and 15th, 2020. The focus of the workshop was atomic layer deposition (ALD) and atomic layer etching (ALE). Prof. Erwin Kessels who hosted the workshop is also the second PhD advisor of […]

Research stay in Aalto University, Finland

Parmish is currently doing her secondment in Aalto University, Espoo, Finland. She is working on the process development for ALD and ALD/MLD during her research stay. It is a collaborative project, HYCOAT which is funded by the European Union in the framework of the H2020 Marie Skłodowska Curie Actions – Innovative Training Networks.

Research stay at CIRIMAT in Toulouse

Sebastian is currently on a research stay at CIRIMAT (Centre Inter-universitaire de Recherche et d’Ingénierie des Matériau) in Toulouse, France. It is a part of the BMBF project focusing on the internationalization networking between France and Germany. Together with our French Partners Dr. Constantin Vahlas (Director, CIRIMAT, CNRS, Toulouse) and Dr. Diane Samelor, he will […]

2nd Young Materials Researchers Day @ RUB

On December 2nd, the Young Materials Researchers Day took place at the RUB convention centre. This event is a great platform for chemists, physicists, engineers and materials scientists to share and discuss their current research and approaches. Our IMC group was represented by Martin Wilken (oral contribution) and Parmish Kaur (poster presentation) who informed the […]

Master theses

This year we had four undergrad students who performed their master theses in our group covering the whole range of research topics that includes development of new metalorganic precursors, thin film deposition, characterization and investigation of functional properties. Martin Wilken synthesized transition metal precursors containing Mo and W suitable for the fabrication of gas sensing […]

Successful AVS ALD 2019 conference in Bellevue, Seattle

Our IMC group participitated in the AVS ALD 2019 conference in Bellevue (Seattle). We were excited to contribute three talks and three posters. It was a great experience to interact with the international ALD community and to discuss about recent developments in the field of precursor chemistry, thin films and nanotechnology. A lasting experience for […]

PhD fellowship for Jan-Lucas

Congratulations to Jan-Lucas who has been awarded with the prestigious PhD Fellowship of the Foundation of German Economy (Stiftung der Deutschen Wirtschaft: SDW). Excellent academic records together with other criteria like general knowledge, social engagement, communication skills, determination to excel in your field of research and studies are the prerequisites for awarding of the SDW […]

David receives fellowships from the “Fonds der Chemischen Industrie” (FCI) and “Deutschen Akademischen Austauschdienstes” (DAAD)

Congratulations to David who has been awarded with the esteemed Kekulé Fellowship of the Chemical Industry Fund (Fonds der Chemischen Industrie: FCI). Excellent academic achievements during the bachelor and master studies are the prerequisite for the awarding of the FCI fellowship. In combination with the reputable One-Year Fellowship of the German Academic Exchange Service (Jahresstipendium […]

Successful EuroCVD 2019 conference

We are back in Bochum and successfully finished our trip to the EuroCVD 22 & Baltic ALD 16 in Luxembourg! We had a great time listening to inspiring talks, fruitfully discussing with colleagues and enjoying social activites. The entire IMC group would like to thank the organizing committee, and especially Dr. Naoufal Bahlawane, for this […]

Three awards for outstanding oral presentations at EuroCVD 2019

Nils Boysen (left), Jan-Lucas Wree (right) and David Zanders (bottom) together with our group leader Anjana Devi. All three IMC group members got awarded for the best oral presentation in their sessions at EuroCVD 22 & Baltic ALD 16 in Luxembourg. Congratulations, keep up the good work!

EuroCVD 22-Baltic ALD 16

This week, our group will participate in the EuroCVD 22-Baltic ALD 16 international conference in Luxembourg. We will contribute 5 talks and 3 posters covering our research fields. So be prepared for new precursor chemistry and process design for ALD and CVD applications!

New bachelor student

We welcome our new bachelor student Florian Preischel who will perform his bachelor thesis in our research group within the summer term. He will focus on the development of Al and Hf precursors suitable for chemical vapor deposition techniques.

New cover page

Our group member Lukas Mai recently published his results on potential precursor alternatives for trimethylaluminium (TMA) together with a cover page in Chemistry – A European Journal. If you are interested in th full article, please click on the cover.

Twitter bot launched

We created a Twitter bot which surveys RSS feeds from scientific journals looking for publications related to CVD, ALD MLD etc. Stay updated and check it out! Follow @CVD_ALD_papers

New cover page

Our group member Sebastian Beer designed an inside cover page for Dalton Transactions visualizing the idea behind our article on rare-earth sulfide MOCVD. For the full article, please click on the image.

Rob Ameloot visiting our group

Today, Rob Ameloot visited our group to give a fascinating talk about “Metal-organic framework chemical vapor deposition (MOF-CVD)”. He is the leader of the Ameloot Group at the KU Leuven, Belgium. With his research, Mr. Ameloot builds a bridge between the unique properties of MOFs and their application in microelectronics through the development of new […]

New cluster tool for 2D-materials and devices funded by the BMBF

A consortium consisting of research groups at RUB that includes engineers (Plasma and Microsystems) and chemists (Inorganic Materials Chemistry) have been granted a new project “ForLab PICT2DES” funded by the Bundesministerium für Bildung und Forschung (BMBF). This is one among the 12 ForLabs in Germany that have been granted by the BMBF. The project team […]

A new research project on corrosion protection coatings funded by the BMBF

Development of innovative corrosion protection coatings (CBC) for injection molds via CVD/PECVD/ALD will be the theme of the new project funded by the BMBF. The consortium includes researchers from Germany and also from France. This joint consortium is a part of the internationalization strategy of the BMBF. The IMC research group will focus on developing […]

New research project on 2D-Materials funded by the DFG within the DFG-SPP program (FFlexCom-SPP-1796)

A new research project FlexMoS2 which will focus on the fabrication of 2D-Materials such as MoS2 has been granted by the German Research Foundation (DFG) within the priority research program FflexCom (DFG-SPP-1796). The joint project entitled ‘Flexible high-speed thin-film transistors and circuits based on large-area grown two-dimensional transition metal dichalcogenides (TMDs)” will be carried out […]

New project: Ultra-thin metal layers by plasma-assisted spatial atomic layer deposition at atmospheric pressure

The Inorganic Materials Chemistry (IMC) at RUB together with the collaborators from the Bergische University Wuppertal (BUW) in Germany have been granted 600k Euros by the German Research Foundation (DFG) for a new research project which will focus on atomic layer deposition of coinage metals like silver and copper. The project entitled “Ultra-thin metal layers […]

Master graduation 2018

On friday, the 14th of december the official graduation ceremony for the master studies in chemistry took place. We congratulate our three master students Jan-Lucas Wree, Nils Boysen and David Zanders (from left to right) to their academic degree “Master of Science – Chemistry”. All three will continue their work as PhD students in 2019. […]

nanoGE Fall Meeting

Our group, represented by Alexander Sadlo, Dennis Zywitzki and Anjana Devi, attended the nanoGE Fall Meeting that was held in Torremolinos (Spain) in October 2018. Within the framework of this conference, a symposium was held that covered the topics on the various aspects of (photo)electrochemical systems . This research topic is funded by the German […]

Ultra-thin transparent silver films for solar cells

Recently, our research was featured on the RUB-homepage! Excerpt: A new fabrication process for transparent ultra-thin silver films has been developed by researchers at Ruhr-Universität Bochum and the University of Wuppertal. The material may help build highly efficient solar cells and light-emitting diodes. However, traditional chemical methods have not been able to produce ultra-thin and […]

Short Term Scientific Mission (STSM) Award for RUB and Aalto University

The two collaborating research groups from the Ruhr University Bochum – (IMC Group, Prof Anjana Devi) and Aalto University, Finland (Department of Chemistry and Materials Science, Prof. Maarit Karppinen) were awarded the best Short Term Scientific Mission (STSM) at the HERALD SUMMIT 2018. Lukas Mai (RUB, IMC) and Zivile Giedraityte (Aalto University) successfully performed a […]


The HERALD Summit 2018 (Hooking together European Research in Atomic Layer Deposition) took place in Braga, Portugal between 25-28th September. Lukas Mai, Martin Wilken, Dennis Zywitzki, David Zanders and Anjana Devi successfully contributed talks (Lukas and David) and Posters (Martin and Dennis) in the research area of ALD and atomic level processing. The Summit is […]

E-MRS Fall 2018 Conference in Warsaw, Poland

Our group was represented at the European Materials Research Society (E-MRS) Fall 2018 Conference in Warsaw, Poland by Anjana Devi, Jan-Lucas Wree and Sebastian Beer. This functional materials-based conference strongly focuses on thin films and the implementation in state-of-the-art technologies. We contributed two talks (Jan-Lucas and Anjana) and a poster (Sebastian) to present and discuss […]

Hycoat Workshop in Ghent, Belgium

Four members of our group participated in the Hycoat Workshop on ALD/MLD in Ghent, Belgium. HYCOAT is a “European Training Network for Functional Hybrid Coatings by Molecular Layer Deposition” which focuses on the development of MLD processes for the fabrication of hybrid thin films implemented in future technologies such as life science and medicine. Parmish […]

ALD 2018 Conference in Incheon, South Korea

Lukas Mai, David Zanders, Nils Boysen and Anjana Devi are representing the IMC group at the AVS 18th International Conference on Atomic Layer Deposition (ALD 2018) in Incheon, South Korea. All three will contribute a talk to the conference featuring results from their current projects.

New cover page

Recently, our group designed the front cover page of the Journal of Materials Chemistry A (Volume 6). If you are interested in the article related to the image CVD-grown copper tungstate thin films for solar water splitting, please klick on the cover below!

PhD graduation

We congratulate our former group members Richard O’Donoghue, Maximilan Gebhard, Sarah Karle, Stefan Cwik and Jiyeon Kim for successfully finishing their doctoral studies! All the best for your future career! Titel of PhD theses: Richard O’Donoghue: Atomic layer deposition of ZnO and Ga2O3 thin films as transparent semiconducting oxides: Influence of precursors on the film […]

New bachelor students

We welcome our new bachelor students Laura Lamkowski and Jean-Pierré Glauber who will perform their bachelor theses in our research group within the summer term. Laura will focus on the synthesis and characterization of precursors for transition metal containing thin films. Jean-Pierré will work on the synthesis and evaluation of rare-earth precursors applicable in MOCVD […]