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New Publication in Angewandte Chemie

We are excited to have contributed to the newly published article in Angewandte Chemie on a topic related to gaining experimental insights into the early steps of the photo-induced dissociation processes at the photocatalyst-water interface, relevant to the design of improved photocatalysts. Thanks to Ellen Backus for navigating the ship to come up with a […]

New DFG-SPP project: 2DPOMristor

We are pleased to be part of the DFG-SPP-2262 consortium teamed up with Dr. Kirill Monakhov (IOM, Leibniz Institute, Leipzig) and Prof. Thomas Heine (TU Dresden). The project 2DPOMristor aims to develop a conceptually new memristive device based on intrinsic and synergetic properties of 2D transition metal dichalcogenides and molecular metal-oxide (polyoxometalates) switching materials.

RPGR 2023 Conference in Bangalore

Some of our team members attended the International Conference on Recent Progress in Graphene Related Materials (RPGR-2023) held in Bangalore, India (Nov. 20 – 24th). While Jean-Pierre and Martin had oral presentations, Florian and Jorit presented their results on topics related to 2D materials. Florian and Jorit were awarded the best poster prizes. The IMC […]

Best PhD Thesis Prize for David

We are extremely proud of David who has been awarded the best PhD prize by the VAA Foundation for his excellent interdisciplinary thesis which he really deserves it for his outstanding research work. He was awarded the binational PhD degree in December 2022. So, another jewel on his crown! CONGRATULATIONS David!!! The prize distribution was […]

Annual meeting of DFG-SPP-2370: Nitroconversion

The first annual meeting of the DFG-SPP project Nitroconversion coordinated by Prof. Roland Marschall from Bayreuth University was held in Boppard (Nov. 2023). We had fruitful interactions with our collaborators from DLR Oldenburg (Dr. Corinna Haarms and Dr. Julian Lorenz) and Prof. Michael Wark from University of Oldenburg. It was great platform to network with […]

ECS 2023 Conference in Gothenburg

Our team represented by Jorit, Harish, Jean-Pierre and Anjana were actively participating at the ECS-244th Conference held in Gothenburg, Sweden (October 8-12th, 2023). While Anjana gave an invited talk, Jean-Pierre and Jorit had contributed oral presentations and two posters. We had the great opportunity to interact with our research collaborators from the SUNRed (DFG-SPP) project. […]

ALPIN 2023 in Chemnitz

The IMC group actively took part in the ALD workshop ALPIN 2023 held in Chemnitz (Sept. 12-13th). Florian and Jean-Pierre gave Keynote talks, while Nils from Fraunhofer IMS had a contributed talk. Our group represented the whole spectrum of our ALD activities starting from precursor chemistry, materials fabrication, and applications. Additionally, we had poster presentations […]

New Perspective Article publications: A nice way to end the SFB-TR-87 project

After twelve years of high quality and extremely productive research which was coordinated outstandingly by Prof. Awakowicz, the SFB-TR-87 came to an end last year. The teams from B section of the SFB project teamed up and published two perspective articles highlighting the importance of the field covering plasmas and materials. Kudos to the entire […]

New DFG project: INTRAPOL

We are very happy that our DFG proposal (INTRAPOL) together with Dr. Teresa de los Arcos and Prof. Thomas Kühne from University of Paderborn was granted. The research topic involves investigation of the underlying mechanisms responsible for the formation of hybrid polymer-inorganic materials by vapor phase infiltration (VPI). We are all set to go!

New Publication

We have identified and explored new Au and Cu precursors for ALD and MOCVD of coinage metal films. Ilam, Nils and Marco teamed up to come up with some exciting molecules which show promising properties for thin film deposition. Next generation N-heterocyclic carbene-stabilized copper and silver precursors for metalorganic chemical vapor deposition and atomic Layer […]


After a break of four years due to the post-pandemic situation, EUROCVD-BALTIC-ALD was held in Leuven, Belgium (May 29th – 2nd June 2023). Our group participated with oral presentations from Jean-Pierre, Nils and Marcel as well as posters from David, Niklas, Martin, Jorit, Florian and Jean-Pierre. It was a great conference and we had lively […]

New DFG project: PHANTOM

We are excited to dig deep into the field of 2D materials and together with Dr. Petr Dementyev from Bielefeld University, we have been recently granted a research project PHANTOM by the DFG. It is intended to study molecular permeation across free-standing 2D oxides such as bilayer silica. To enable the mass transport experiments with […]

New Publication

We are happy to contribute to the BMBF-ForMikro project FlexTMDSense with a new joint publication on tuning 2D materials with laser treatment together with the group of Prof. Ostendorf (LAT, RUB), Dr. Bock (MST, RUB) and the Fraunhofer IMS team (Dr. Michel and Dr. Neubieser). An exciting field to work on and looking forward to […]

Happy Holidays and a good start into 2024

Happy holidays and merry christmas to those who celebrate from the whole IMC Team. A big thank you to all of our friends, colleagues and collaborators. It was a great and productive year with many successes and new opportunities coming in the next year. Stay healthy and see you all in 2024!

New DFG Project

We are excited to explore rare earth sulfide thin films for potential optoelectronic and magneto-optical applications. A joint collaboration between our IMC team at RUB and that of Dr. Joerg Debus from TU Dortmund will look into the properties of rare earth materials, especially with respect to advanced technologies such as quantum sensing and quantum […]

ALPMOH Project Research Stay

To initialize the second year of the atomic layer processing of metal organic hybrid materials (ALPMOH) project that is running in cooperation with the Aalto university in Finland, we welcomed Topias Jusila to our laboratories. He spent two exciting weeks with us to experience the synthesis of new iron precursors that will be used to […]

New Summer Intern

The IMC team has welcomed Aditya Verma from Shiv Nadar University India, who was awarded the DAAD-Wise fellowship to carry out a internship in our group. He has been active working in the project related to rare earth materials. Wishing him good luck with his project.

EuroCVD/Baltic ALD 2023

The EuroCVD/Baltic ALD 2023 took place in Leuven after a four year break due to the pandemic. It was held this time in the beautiful city of Leuven in Belgium between 29th of May and 2nd of June. With three talks and seven posters, IMC had a strong representation at the event. We had a […]

New Publication

Our joint research with team of Prof. Achim von Keudell’s from Experimental Physics II Reactive Plasma Department (RUB) focussd on the influence of plasma activated precursor species on the growth properties of ZrO2 via PECVD. This work was done within the framework of the joint project (CAP-TBC) funded by the BMBF in collaboration with researchers […]

New Publication in Small

Just in time for the arrival of Spring, a highly productive collaboration with Prof. Julien Bachmann’s group from Friedrich Alexander University Erlangen has blossomed and results in hot off the press publication in Wiley’s Small Journal. Together, we explored a smart precursor solution for highly controllable Additive Layer Atomic Manufacturing (ALAM) of ZnO thin lines […]

New publication in ACS Materials Au

In a collaborative effort with researchers from Air Liquide (Japan) and the IMC team in Bochum, LMGP Grenoble (France) led by Matthieu Weber, a new feature article on pathways to lower the environmental impact of ALD was just published in ACS Materials Au. As the global warming is making its impact, new ways to mitigate […]


In late March, the annually organized „ALD4Industry“ conference taking place in Dresden had entered the next round. Be it during the presentation or poster sessions or informally behind the scenes, the “who is who” of the European Semiconductor Industry and Academia was getting together to discuss the latest market trends. Besides, many participants from overseas […]

IMC REACTIVE team goes to France

Three IMC PhD students, Martin, Marcel and Jorit had the opportunity to visit fellow scientists and collaboration partners at the Gremi in Orleans who hosted the half-yearly project meeting. The DFG-ANR funded binational REACTIVE project focuses on new plasma assisted spatial ALD processes for solar cell applications. The host team showed the latest developments for […]

Plasma-Enhanced Atomic Layer Deposition of Molybdenum Oxide Thin Films at Low Temperatures for Hydrogen Gas Sensing

J.-L. Wree, D. Rogalla, A. Ostendorf, K. D. Schierbaum, A. Devi
ACS Appl. Mater. Interfaces, 2023, 15, 11, 14502–14512

Happy Holidays and a good start into 2023

Happy holidays and merry christmas to those who celebrate from the whole IMC Team. It has been a productive and successful year with over 20 publications, many conferences and recently two excellent PhD defenses. A big thank you to all of our friends, colleagues and collaborators. Stay healthy and see you all in 2023!

A first binational PhD in the IMC Group. PhD Defense of David

We are proud of David who successfully defended his thesis on 15.12.2022 and obtained a binational PhD which he deserved for his outstanding achievement. The defense was held in a hybrid format. The examiners that were present in person included Prof. Sean Barry (Carleton University, Canada), Prof. Erwin Kessels (TU/E, Eindhoven, The Netherlands), Prof. Peter […]

New Publication in Small

2022 has been yet another difficult year due to the pandemic. But it has also been extremely productive with several peer reviewed publications in high impact factor journals. The latest one for this year is a new publication in Small with our collaborators from Bielefeld University and Yale University on 2D-SiO2 membranes. We are very […]

PhD Defense of Nils

On Thursday (08.12.2022), Nils Boysen successfully defended his PhD thesis. Based on his excellent presentation on new precursors for spatial ALD and CVD of metals, followed by the oral exam, Nils could successfully convince the examination team of Prof. Thomas Riedl (University of Wuppertal), Prof. Maarit Karppinen (Aalto University, Finland) and Prof. Anjana Devi (RUB). […]

New Publication in Eur. J. Mass Spectrometry

Electron impact mass spectrometry (EI-MS) is a valuable tool to characterize CVD/ALD precursors and it typically provides the molecular mass as well as decomposition pattern of precursors to elaborate on the stability of the molecules in the gas phase. However, for unstable and reactive precursors, EI-MS reaches its limits. As a promising alternative, liquid injection […]

New Publications

In collaboration with our research partners at Fudan University in China (group of Prof. Hong-Liang Lu), two new publications have evolved on the research topic MEMS-based gas sensors using functional metal oxides.

New Publication

CVD grown tungsten oxide for low temperature hydrogen gas sensors: Tuning surface characteristics via materials processing for sensing applications A new tungsten precursor enabled the fabrication of nanostructured WO3 thin films via CVD at moderate process conditions. The metal oxide layers were integrated into interdigitated chemical sensor architecture and were found to be very appealing […]

New Publication

In our new publication, we highlight the importance of precursor development for the deposition of Iridium thin films by MOCVD for electrocatalytic applications. This study illustrates a complete process-chain starting from precursor development, through CVD process optimization and finally application of the high-quality Iridium thin films as electrodes for the electrocatalytic HER in hydrogen production. […]

New Publication

T. Berning, M. Becher, J.-L. Wree, J. Jagosz, A. Kostka, A. Ostendorf, A. Devi, C. Bock Nucleation and growth studies of large-area deposited WS2 on flexible substrates We are very happy to announce the release of a new publication. Great collaborative research led by our partners at MST within the DFG project FlexMOS (SPP1796/DE-790-17-1) and […]

SUNRed – Kick-Off Meeting

We are happy to be a part of the newly granted DFG-SPP program (SPP-2370) coordinated by Prof. Roland Marschall from Bayreuth University. On 12th and 13th of October we met in Bayreuth for the kick-off meeting of the SPP project. Together with Corinna Harms, Julian Lorenz (DLR, Oldenburg), Michael Wark (UOL, Oldenburg) and the Mercartor […]

New Publication

R.-M. Neubieser, J.-L. Wree, J. Jagosz, M. Becher, A. Ostendorf, A. Devi, C. Bock, M. Michel, A. Grabmaier Low-Temperature ALD Process Development of 200 mm wafer-scale MoS2 for Gas Sensing Application Micro and Nano Engineering, Vol. 15, 100126 (2022) Another successful study from our projects DFG-FlexMOS (SPP1796) and BMBF-FlexTMDSense on large-area and low-temperature deposition of […]

A new generation of Ru precursors

Our industry collaboration with a team from Heraeus Precious Metals is dedicated to the development of novel and innovative ruthenium precursors for gas phase deposition applications. In a recently published study we unveiled Ru(II) arene diazadienyl complexes not only as promising precursor class and illustrated their capabilities in a detailed proof-of-concept study but confirmed their […]

New Publication in Advanced Materials Technologies

Our collaborators from the University of Wuppertal (BUW), Tim Hasselmann and Thomas Riedl, recently published this new paper on the deposition of thin silver electrodes by spatial ALD using our newly developed silver precursor Ag(NHC)(hmds) at remarkably low deposition temperatures. The silver electrodes function very well in organic solar cells and can keep up with […]

New Publication in Zeitschrift für Allgemeine und Anorganische Chemie

Our Canadian-German collaboration with the Barry Lab and other Canadian researchers strikes yet again! In a recently accepted study, a literally twisted Co(II) silylamide was in-depth investigated as precursor for chemical vapor based deposition processes. You like nifty, little molecules? Then check out the accepted article here.

E-MRS 2022 Fall Meeting

The IMC team represented by five people took part in the E-MRS 2022 Fall meeting in Warsaw between 19 – 22nd of September. The symposium A was coordinated by Ana Boras (CSIC Seville), Anjana Devi (RUB, Bochum), Mariona Coll (ICMAB, Barcelona) and Joe Briscoe (QMUL, UK). David, Jorit and Niklas had the great opportunity to […]

REACTIVE: Kick-Off Meeting

On 14th of September we finally had the kick-off meeting for our new French German project: REACTIVE Together with the French research groups of David Muñoz-Rojas (G-INP LMGP), Dunpin Hong (UO GREMI) and Thomas Fix (ICUBE), we will research on “New spatial atomic layer deposition precursors and plasma processes towards functional materials for advanced applications”. […]

ALPIN Workshop 2022

On 12th and 13th of September we were co-hosting the second ALPIN workshop together with the team of Fraunhofer IMS from Duisburg. It was a very successful event where we had two great days full of interesting talks and poster presentations. We could further strengthen the networking within the German ALD community. Very strong participation […]

ALPMOH Project Update! DAAD & Academy of Finland Exchange Program

After two visitors from Finland have already been hosted in our laboratory to experience synthesis for copper and alkali metal precursors, the first two candidates from the IMC group now went to Aalto University to continue the exchange. Nils and Jorit have spent two weeks in the laboratories of Maarit Karppinen and gained new experiences […]

Two new publications in Dalton Transactions

Two back-to-back publications in Dalton Transactions are accepted and we are very happy with this excellent and productive collaboration with Aalto University. 1. Growth of metalcone thin films using non-pyrophoric precursors. A new perspective for developing alternative precursors. Low-temperature ALD/MLD growth of alucone and zincone thin films from non-pyrophoric precursors Anish Philip, Lukas Mai, Ramin […]

Open position – Wir suchen eine/n SHK

New publication for our Metal ALD project

Another successful collaborative output together with researchers from the Bergische Universität Wuppertal (BUW) within the framework of the Metal ALD project funded by the DFG. You can find updates about the publication (currently in press) here.

Best poster prize to David Zanders

Congratulations to David for winning a best poster prize at the ALD 2022 conference for his exciting work on new Ru precursors. Thanks to the Heraeus Precious Metals team for the great collaboration.

ALD 2022 Conference

The IMC team took part in the AVS 22nd International Conference on Atomic Layer Deposition (ALD 2022) that was held in Gent (Belgium) between 27 – 29th June 2022. Our team had six oral presentations and five posters. It was an excellent and productive conference where we were able to network with the experts in […]

New publication

Great collaborative research work between Johannes Kepler University of Linz (Austria), Carleton University (Canada), and RUB on CVD of ferromagnetic cobalt disulfide. Results just published in ACS Applied Electronic Materials highlighting the implementation of a new cobalt precursor for the fabrication of ferromagnetic and phase-pure cobalt disulfide via metal-organic CVD that is demonstrated for the […]

Honorary Doctorate from Aalto University to Anjana Devi

The Conferment Ceremony of Aalto University was held last week (16-17th June in Finland) where the honorary Doctor of Technology to Anjana was conferred. We could watch the event via live streaming and was great to see the impressive tradition of doctorate conferment at Aalto University. A great honour for our team with our group […]

ALPIN Network Meeting: 2022

Save the Date and Register: RUB and Fraunhofer IMS in Duisburg will jointly host the second edition of the ALPIN Network Meeting where the ALD community of Germany will gather and interact. Please go ahead and register at the following website for the two-day event (12th – 13th September 2022). For more information and updates […]

EMRS-2022 Fall Meeting in Warsaw, September 21-23rd 2022

Symposium A: Materials, components, and characterization of energy harvesters for self-powered electronics Within the framework of the ongoing NATOENER project coordinated by Dr. Mariona Coll, a satellite symposium will be organized by the project PI’s Dr. Mariona Coll (ICMAB-CSIC, Barcelona), Dr. Ana Borras (ICMS-CSIC-US, Sevilla), Dr. Jose Briscoe (Queen Mary University of London) and Prof. […]

VIP Guest and Mercator Fellow at IMC Labs

Great to have Prof. Erwin Kessels back at RUB after a break of two years. We enjoyed his inspiring lectures on ALD and ALE. The interaction with the doctoral and master’s students was very fruitful. Erwin is a Mercator Fellow within the SFB-TR-87 and a Visiting International Professor (VIP) at RUB.

Workshop on Spatial ALD, TU/e Netherlands

Nils, Jorit, Florian, and Jean-Pierre were at Eindhoven University of Technology (TU/e), Netherlands to attend the Workshop on Spatial ALD (June 9th, 2022). Nils gave an excellent talk on the specifics needed for the precursors to be implemented in spatial ALD. It was a great event where leading experts on ALD/SALD and industries participated.

Nano 2022 Conference and Visit to CMS-CSIC, Sevilla, Spain

Visiting the laboratories of Dr. Ana Borras (Research Group of Thin Films Engineering and Nanotechnology) at CMS, CSIC Sevilla during the Nano-2022 conference held in Sevilla between June 6th – 10th, 2022, where Anjana gave an invited talk on 2D Materials. Despite the mercury touching 40 °C, it was a great conference to attend and […]

ALPMOH Project: DAAD-Academy of Finland Exchange Program

We are happy to host Dr. Anish Philipp from Aalto University who is here at RUB within the framework of the DAAD-Finnish Academy “ALPMOH” project between RUB and Aalto University. The exchange of young researchers stays at the partner labs is the focus of this project where they get training on research activities on complementary […]

SFB-TR-87 Summit Meeting

The SFB-TR-87 Summit was held in Garmisch-Partenkirchen (May 15-18th). It was a great event with the participation of the SFB members and the Mercator fellows who came from different parts of the globe. The inspiring talks and the Summit venue were a perfect treat after two years of online interactions.

Hot Article in Dalton Transaction

We are excited to note that our recent paper in Dalton Transaction Influence of Different Ester Side Groups in Polymers on the Vapor Phase Infiltration with Trimethyl Aluminum has been selected a HOT ARTICLE. A timely research topic to work on and we will pursue this further together with our national and international partners.

New paper published

Atomic / Molecular Layer Deposition of Cerium (III) Hybrid Thin Films using Rigid Organic Precursors Within the framework of the EU-ITN-HYCOAT (H2020) project, new Ce-based hybrid thin films were fabricated using ALD/MLD approach. The collaboration included Prof. Maarit Karppinen’s group from Aalto University, Finland and Prof. Michael Nolan’s group from Tyndall National Lab, Ireland. Cerium […]

ALPMOH Kick-Off Meeting

We are happy to announce we had our Kick-Off meeting for the ALPMOH project (Atomic Layer Processing of Metals, Metal Oxide and Hybrid Thin Films for Advanced Applications) together with the team of Prof. Maarit Karppinen from Aalto University, Finland. This project funded for two years by the DAAD (Deutscher Akademischer Austauschdienst / German Academic […]

Press Release: A sieve for molecules

Interested in 2D materials fabricated by ALD? Our recent collaboration with the Bielefeld University was featured in a special press release by the Ruhr University. The full publication can be found here.

New cover page

Check out our new cover feature now published in Chemistry – A European Journal which was designed by our PhD student Nils Boysen. It illustrates the pursuit of new precursors for the deposition of coinage metals by atomic layer deposition (ALD). In this study a series of new N-heterocyclic carbene (NHC)-based CuI and AgI complexes […]

Group Dinner

On Tuesday 22nd of February we had a group dinner to welcome Chan-Mi and Ga Yeon who are visiting from Korea for a two weeks research stay.

New paper published

A broad set of new carbene based Cu and Ag precursors were developed and together with our research collaborators at Aalto University in Finland, their applicability for the thermal atomic layer deposition (ALD) of coinage metal films was successfully demonstrated. Role of anionic backbone in NHC-stabilized coinage metal complexes: New precursors for atomic layer deposition […]

New Cover page

Check out our new cover feature in Chem. Mater. designed by Sebastian Beer. It illustrates the optomagnetic properties of ferromagnetic europium sulfide grown via CVD showing a phonon–magnon coupling upon optical excitation. These optomagnetic properties could lead to the development of new spin-dependent devices for future electronics. The paper is a successful collaboration between the […]

Merry Christmas and a Happy New Year

We wish everyone a Merry Christmas. Stay healthy!

DAAD Project

Christmas present! A great way to end the year 2021. A new DAAD project funding for a joint collaboration between the IMC group at RUB and Aalto University, Finland has been granted. This project will involve staff and student exchange as well as promote joint PhD between the two universities.

New Project: ANR-DFG Annual Call 2021: French-German Joint Collaboration Projects in Natural, Life and Engineering Sciences

Our project proposal on “New spatial atomic layer deposition precursors and processes towards functional materials for advanced applications” (Acronym: REACTIVE) has been granted by the DFG and ANR. Collaborating partners from IMC@RUB and LMGP, CNRS Grenoble were successful in obtaining this highly competitive as well as innovative bi-national project focusing on large area thin film […]

European Network for Innovative and Advanced Epitaxy

We are very happy to announce that our IMC group has joined the “The EU-COST Action CA-20116 (2021-2025) OPERA: “European Network for Innovative and Advanced Epitaxy”. This is the 3rd EU-COST Action where IMC group was involved in the European-level co-operation and networking after, CA – CELINA – CM1301 (2013 -2017) and CA – HERALD- […]

PhD Defense of Dennis

Congrats Dennis. Well done! A successful stint at RUB as a student and doctoral researcher! With Dennis Zywitzki, who has successfully defended his PhD thesis on Tuesday the 12th of October, we now have to say goodbye to another generation of Devi-Group PhD students. Dennis was giving an excellent presentation of his research on precursor […]

PhD Defense of Sebastian

Last Friday, Sebastian Beer successfully defended his PhD thesis giving a great talk about his work on precursor development and CVD for optomagnetics and corrosion protection coatings. You may call yourself Dr. Beer now, a name to remember. Congratulations Basti! Well-deserved, we are proud of you!

Farewell to Manuela

We will definitely miss Manuela Winter, our „Ms. X-ray“! Thank you Manuela for all your support and great team work together with Anjana’s Kindergarten over the years! More than 40 joint publications with the IMC group demonstrate the great team work and your excellent crystallography skills. Wishing you all the best and ‘live long and […]

New Cover Page

A new cover page in Journal of Materials Chemistry C designed by Jan. This research work on thin WS2 layers demonstrates the potential of 2D-type of materials for sensing and electrocatalytic applications. A productive output and collaboration between Prof. Schuhmann’s group at RUB, the ZGH (Zentrum für grenzflächendominierte Höchstleistungswerkstoffe), RUBION, our industry partner Paragon GmbH […]

Chemical vapor deposition of Cobalt and Nickel Ferrite thin films: Investigation of structure and pseudocapacitive properties

D. Zywitzki, R. Schaper, E. Ciftyürek, J.-L. Wree, D. H. Taffa, D. M. Baier, D. Rogalla, Y. Li, M. Meischein, A. Ludwig, Z. Li, K. Schierbaum, M. Wark, A. Devi
Adv. Mater. Interfaces, 2021, 8, 2100949

Best PhD Thesis Award from the GDCh!

Congratulations Lukas! You deserve it! We are proud that Lukas Mai was awarded the GDCh best thesis award for his interdiscplinary PhD thesis involving chemistry, material science and engineering. Precursors are building blocks for CVD and ALD of nanostructured functional films. At times, simple chemistry makes a big change! When new metalorganic complexes are in […]

New Project: NATOENER

We are very excited to announce a new international collaborative project NATOENER – Nanostructures with atomic Precision for next generation Energy Harvesting Devices. The project is funded by i-Link+, a Grant coordinated by Dr. Mariona Coll at ICMAB in Barcelona, Spain. NATOENER is looking into the development of multisource energy harvesters, devices that can convert […]

ACS Editor’s Choice

We are excited to announce that David Zanders’ recent publication “Cobalt Metal ALD: Understanding the Mechanism and Role of Zinc Alkyl Precursors as Reductants for Low Resistivity Co Thin Films” is part of the ACS Editor’s Choice program and will be freely available for six month. Congratulations to David and everyone who has contributed to […]

New master student on board

We welcome Marcel Schmickler joining our IMC team as a new Master student. He will be working on synthesis and characterization of lanthanide precursors. We wish him a productive research stay!

Congratulations to Anjana

The Royal Society of Chemistry (RSC) journal “Dalton Transactions” has nominated Anjana to the Editorial Advisory Board effective from January 2021 in recognition of her contributions towards the research areas of Inorganic and Materials Chemistry. A further motivation for all of us! The IMC team wishes her more success in her future research career!

Santa brought a present for Anjana

Thanks to my “Kindergarten” for the beautiful Christmas gift. You guys are my motivation to carry on doing high-quality research! Keep up the spirit!

New Cover page

Check out our new cover feature in Chem. Eur. J. designed by our PhD student Parmish Kaur which demonstrates a water assisted ALD process of CeO2 thin films. The background picture was taken by herself during a flight. The paper is a successful outcome of the EU-ITN-HYCOAT project collaborating with Tyndall National institute (Ireland), Aalto […]

Merry Christmas and a Happy New Year!

What a year! So far, our group was lucky dodging the Corona virus and everybody is healthy which is most important. Despite the challenging situation in terms of organizing and mastering lab work and home office, we had a successful year 2020. We especially would like to thank all our cooperation partners for the fruitful […]

New cover page in ChemComm

Check out our new cover page with the red tail of the comet “Neowise” (C/2020 F3) photographed by our PhD student Nils Boysen this summer. If you are interested in the story behind this fancy image, just click on the cover page to be redirected to the article about the spatial ALD of conducting copper […]

New in-depth student on board

Jorit Obenlünenschloß has recently found his way to the IMC Group. Together with David, he works on the synthesis of novel cobalt(II) precursors for CVD/ALD applications and conducts fundamental reactivity studies to elucidate mechanisms behind ALD thin film formation. We are happy to have you with us Jorit! Which cobalt(II) complex has the nicest color?

PhD Defense of Lukas

Today, Lukas Mai successfully defended his PhD thesis. Of course, due to the CoVid-19 situation, the disputation was held in the frame of an online zoom conference. As expected, Lukas delivered a rock-solid talk about his studies during his PhD project. In total, 14 publications as well as his innovative ideas in precursor chemistry and […]

New cover page

Check out our new “Sci-Fi” cover page designed by our PhD student Niklas Huster. If you are interested in the story behind this fancy image, just click on the cover page to be redirected to the article about additive-free spin-coating of SnO2.

New bachelor student

We welcome our new bachelor student Isabell Arentz who will perform her bachelor theses in our research group within the summer term. Isabell will focus on the synthesis and characterization of coinage metal precursors for CVD and ALD. We wish her all the best for her studies!

New chemistry for ultra-thin gas sensors

Our group member Lukas Mai recently published his work on PEALD ZnO thin films for gas sensing applications in the renowned Journal Small. Now, his studies are highlighted and summarized in a press release article of our university! Click here to be redirected to the English version of the article. Für die deutsche RUB Pressemitteilung […]

Nickel oxide thin films for oxygen evolution reaction

Congratulations! Dennis’ recent research work on Ni β-ketoiminates is published in Inorganic Chemistry. Apart from developing a new class of Ni precursors, NiO thin films were grown via CVD and its assessment in electrocatalysis revealed promising activity for oxygen evolution reactions (OER). Another fruitful collaboration with Dr. Dereje Taffa and Prof. Michael Wark from the […]

Cover page in Small

Our Master student Florian is not only working in the lab – He designed the cover page for the journal Small! Check out the creative and fancy artwork that he created illustrating the sensing behavior of Zinc Oxide layers fabricated via PEALD using a non-pyrophoric zinc precursor. For more details click on the cover which […]

An unusual cobalt compound

Interested in Co precursor chemistry? David developed a novel, rather unusual Co complex with a spin configuration of 1/2 which could be of interest for future battery technology. These exciting news were recently highlighted in a RUB press release! The articles are available in both German and English language: RUB press release RUB Pressemitteilung

Finnische Universität zeichnet Anjana Devi aus

Unsere Arbeitsgruppenleiterin Anjana Devi wurde kürzlich mit der Ehrendoktorwürde der Aalto Universität aus Finnland ausgezeichnet. Ausschlaggebend für die Ehrung ist ihre führende Position im Bereich der Präkursoren- und Dünnschichtentwicklung sowie ihr jahrelanges Engagement im Bereich der Vernetzung der ALD und CVD Gemeinschaft. Deine Arbeitsgruppe ist stolz auf deine Leistung und wir dürfen dich nun Prof. […]

Honorary Doctor of Science in Technology award for Anjana

“Hard work always pays off…” These words have always been a great motivation for our group leader Anjana. Today, Aalto University (Finland) cherished this attitude and awarded her with the honorary doctorate of technology 2020 for her leading role in ALD and her contribution in bringing the ALD and CVD research communities together. With this […]

David is back in Bochum with the IMC Group again!

Group photo of the BarryLab members (fall 2019). After a fruitful and synthesis-loaded research stay in the BarryLab at Carleton University (Ottawa, CA), David has returned safe and sound. Based on the first stint of his binational Cotutelle Program between RUB and Carleton, David has spent half a year abroad to study unusual cobalt complexes […]

New paper published in Small

We have a new paper published in Small. This research topic led from the front by Lukas focused on a complete process chain starting from designing a Zn precursor, optimizing a PEALD processfor high-quality nanostructured ZnO followed by the application of the resulting ZnO thin films for dual applications. This includes its function as gas […]

Coronavirus situation at RUB

In view of the issues related to the Coronavirus pandemie we have been asked by the RUB authorities to close our labs and offices effective from 18.3.2020 as a precautionary measure. If you need to contact us, please send an email to Anjana Devi or the IMC administation.

VIP Prof. Erwin Kessels at RUB

Prof. Erwin Kessels who is the Chair of Plasma and Materials Processing (PMP) group at the Eindhoven University of Technology (TU/e) has been recently appointed as a Visiting International Professor (VIP) at the Ruhr University Bochum within the framework of the RUB Research School activities. The Inorganic Materials Chemistry (IMC) group is hosting him and […]

ALD Academy Workshop in Eindhoven

Jan-Lucas, Niklas, Jean-Pierre and Florian attended the ALD Academy Workshop that was hosted at the Eindhoven University of Technology (TU/e) on January 14th and 15th, 2020. The focus of the workshop was atomic layer deposition (ALD) and atomic layer etching (ALE). Prof. Erwin Kessels who hosted the workshop is also the second PhD advisor of […]

Research stay in Aalto University, Finland

Parmish is currently doing her secondment in Aalto University, Espoo, Finland. She is working on the process development for ALD and ALD/MLD during her research stay. It is a collaborative project, HYCOAT which is funded by the European Union in the framework of the H2020 Marie Skłodowska Curie Actions – Innovative Training Networks.

Research stay at CIRIMAT in Toulouse

Sebastian is currently on a research stay at CIRIMAT (Centre Inter-universitaire de Recherche et d’Ingénierie des Matériau) in Toulouse, France. It is a part of the BMBF project focusing on the internationalization networking between France and Germany. Together with our French Partners Dr. Constantin Vahlas (Director, CIRIMAT, CNRS, Toulouse) and Dr. Diane Samelor, he will […]

2nd Young Materials Researchers Day @ RUB

On December 2nd, the Young Materials Researchers Day took place at the RUB convention centre. This event is a great platform for chemists, physicists, engineers and materials scientists to share and discuss their current research and approaches. Our IMC group was represented by Martin Wilken (oral contribution) and Parmish Kaur (poster presentation) who informed the […]

Master theses

This year we had four undergrad students who performed their master theses in our group covering the whole range of research topics that includes development of new metalorganic precursors, thin film deposition, characterization and investigation of functional properties. Martin Wilken synthesized transition metal precursors containing Mo and W suitable for the fabrication of gas sensing […]

Successful AVS ALD 2019 conference in Bellevue, Seattle

Our IMC group participitated in the AVS ALD 2019 conference in Bellevue (Seattle). We were excited to contribute three talks and three posters. It was a great experience to interact with the international ALD community and to discuss about recent developments in the field of precursor chemistry, thin films and nanotechnology. A lasting experience for […]

PhD fellowship for Jan-Lucas

Congratulations to Jan-Lucas who has been awarded with the prestigious PhD Fellowship of the Foundation of German Economy (Stiftung der Deutschen Wirtschaft: SDW). Excellent academic records together with other criteria like general knowledge, social engagement, communication skills, determination to excel in your field of research and studies are the prerequisites for awarding of the SDW […]

David receives fellowships from the “Fonds der Chemischen Industrie” (FCI) and “Deutschen Akademischen Austauschdienstes” (DAAD)

Congratulations to David who has been awarded with the esteemed Kekulé Fellowship of the Chemical Industry Fund (Fonds der Chemischen Industrie: FCI). Excellent academic achievements during the bachelor and master studies are the prerequisite for the awarding of the FCI fellowship. In combination with the reputable One-Year Fellowship of the German Academic Exchange Service (Jahresstipendium […]

Successful EuroCVD 2019 conference

We are back in Bochum and successfully finished our trip to the EuroCVD 22 & Baltic ALD 16 in Luxembourg! We had a great time listening to inspiring talks, fruitfully discussing with colleagues and enjoying social activites. The entire IMC group would like to thank the organizing committee, and especially Dr. Naoufal Bahlawane, for this […]

Three awards for outstanding oral presentations at EuroCVD 2019

Nils Boysen (left), Jan-Lucas Wree (right) and David Zanders (bottom) together with our group leader Anjana Devi. All three IMC group members got awarded for the best oral presentation in their sessions at EuroCVD 22 & Baltic ALD 16 in Luxembourg. Congratulations, keep up the good work!

EuroCVD 22-Baltic ALD 16

This week, our group will participate in the EuroCVD 22-Baltic ALD 16 international conference in Luxembourg. We will contribute 5 talks and 3 posters covering our research fields. So be prepared for new precursor chemistry and process design for ALD and CVD applications!

New bachelor student

We welcome our new bachelor student Florian Preischel who will perform his bachelor thesis in our research group within the summer term. He will focus on the development of Al and Hf precursors suitable for chemical vapor deposition techniques.

New cover page

Our group member Lukas Mai recently published his results on potential precursor alternatives for trimethylaluminium (TMA) together with a cover page in Chemistry – A European Journal. If you are interested in th full article, please click on the cover.

Twitter bot launched

We created a Twitter bot which surveys RSS feeds from scientific journals looking for publications related to CVD, ALD MLD etc. Stay updated and check it out! Follow @CVD_ALD_papers

New cover page

Our group member Sebastian Beer designed an inside cover page for Dalton Transactions visualizing the idea behind our article on rare-earth sulfide MOCVD. For the full article, please click on the image.

Rob Ameloot visiting our group

Today, Rob Ameloot visited our group to give a fascinating talk about “Metal-organic framework chemical vapor deposition (MOF-CVD)”. He is the leader of the Ameloot Group at the KU Leuven, Belgium. With his research, Mr. Ameloot builds a bridge between the unique properties of MOFs and their application in microelectronics through the development of new […]

New cluster tool for 2D-materials and devices funded by the BMBF

A consortium consisting of research groups at RUB that includes engineers (Plasma and Microsystems) and chemists (Inorganic Materials Chemistry) have been granted a new project “ForLab PICT2DES” funded by the Bundesministerium für Bildung und Forschung (BMBF). This is one among the 12 ForLabs in Germany that have been granted by the BMBF. The project team […]

A new research project on corrosion protection coatings funded by the BMBF

Development of innovative corrosion protection coatings (CBC) for injection molds via CVD/PECVD/ALD will be the theme of the new project funded by the BMBF. The consortium includes researchers from Germany and also from France. This joint consortium is a part of the internationalization strategy of the BMBF. The IMC research group will focus on developing […]

New research project on 2D-Materials funded by the DFG within the DFG-SPP program (FFlexCom-SPP-1796)

A new research project FlexMoS2 which will focus on the fabrication of 2D-Materials such as MoS2 has been granted by the German Research Foundation (DFG) within the priority research program FflexCom (DFG-SPP-1796). The joint project entitled ‘Flexible high-speed thin-film transistors and circuits based on large-area grown two-dimensional transition metal dichalcogenides (TMDs)” will be carried out […]

New project: Ultra-thin metal layers by plasma-assisted spatial atomic layer deposition at atmospheric pressure

The Inorganic Materials Chemistry (IMC) at RUB together with the collaborators from the Bergische University Wuppertal (BUW) in Germany have been granted 600k Euros by the German Research Foundation (DFG) for a new research project which will focus on atomic layer deposition of coinage metals like silver and copper. The project entitled “Ultra-thin metal layers […]

Master graduation 2018

On friday, the 14th of december the official graduation ceremony for the master studies in chemistry took place. We congratulate our three master students Jan-Lucas Wree, Nils Boysen and David Zanders (from left to right) to their academic degree “Master of Science – Chemistry”. All three will continue their work as PhD students in 2019. […]

nanoGE Fall Meeting

Our group, represented by Alexander Sadlo, Dennis Zywitzki and Anjana Devi, attended the nanoGE Fall Meeting that was held in Torremolinos (Spain) in October 2018. Within the framework of this conference, a symposium was held that covered the topics on the various aspects of (photo)electrochemical systems . This research topic is funded by the German […]

Ultra-thin transparent silver films for solar cells

Recently, our research was featured on the RUB-homepage! Excerpt: A new fabrication process for transparent ultra-thin silver films has been developed by researchers at Ruhr-Universität Bochum and the University of Wuppertal. The material may help build highly efficient solar cells and light-emitting diodes. However, traditional chemical methods have not been able to produce ultra-thin and […]

Short Term Scientific Mission (STSM) Award for RUB and Aalto University

The two collaborating research groups from the Ruhr University Bochum – (IMC Group, Prof Anjana Devi) and Aalto University, Finland (Department of Chemistry and Materials Science, Prof. Maarit Karppinen) were awarded the best Short Term Scientific Mission (STSM) at the HERALD SUMMIT 2018. Lukas Mai (RUB, IMC) and Zivile Giedraityte (Aalto University) successfully performed a […]


The HERALD Summit 2018 (Hooking together European Research in Atomic Layer Deposition) took place in Braga, Portugal between 25-28th September. Lukas Mai, Martin Wilken, Dennis Zywitzki, David Zanders and Anjana Devi successfully contributed talks (Lukas and David) and Posters (Martin and Dennis) in the research area of ALD and atomic level processing. The Summit is […]

E-MRS Fall 2018 Conference in Warsaw, Poland

Our group was represented at the European Materials Research Society (E-MRS) Fall 2018 Conference in Warsaw, Poland by Anjana Devi, Jan-Lucas Wree and Sebastian Beer. This functional materials-based conference strongly focuses on thin films and the implementation in state-of-the-art technologies. We contributed two talks (Jan-Lucas and Anjana) and a poster (Sebastian) to present and discuss […]

Hycoat Workshop in Ghent, Belgium

Four members of our group participated in the Hycoat Workshop on ALD/MLD in Ghent, Belgium. HYCOAT is a “European Training Network for Functional Hybrid Coatings by Molecular Layer Deposition” which focuses on the development of MLD processes for the fabrication of hybrid thin films implemented in future technologies such as life science and medicine. Parmish […]

ALD 2018 Conference in Incheon, South Korea

Lukas Mai, David Zanders, Nils Boysen and Anjana Devi are representing the IMC group at the AVS 18th International Conference on Atomic Layer Deposition (ALD 2018) in Incheon, South Korea. All three will contribute a talk to the conference featuring results from their current projects.

New cover page

Recently, our group designed the front cover page of the Journal of Materials Chemistry A (Volume 6). If you are interested in the article related to the image CVD-grown copper tungstate thin films for solar water splitting, please klick on the cover below!

PhD graduation

We congratulate our former group members Richard O’Donoghue, Maximilan Gebhard, Sarah Karle, Stefan Cwik and Jiyeon Kim for successfully finishing their doctoral studies! All the best for your future career! Titel of PhD theses: Richard O’Donoghue: Atomic layer deposition of ZnO and Ga2O3 thin films as transparent semiconducting oxides: Influence of precursors on the film […]

New bachelor students

We welcome our new bachelor students Laura Lamkowski and Jean-Pierré Glauber who will perform their bachelor theses in our research group within the summer term. Laura will focus on the synthesis and characterization of precursors for transition metal containing thin films. Jean-Pierré will work on the synthesis and evaluation of rare-earth precursors applicable in MOCVD […]