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Publications 2016

  • Review Article: Recommended reading list of early publications on atomic layer deposition – Outcome of the “Virtual Project on the History of ALD
    Esko Ahvenniemi Andrew R. Akbashev Saima Ali Mikhael Bechelany Maria Berdova Stefan Boyadjiev David C. Cameron Rong Chen Mikhail Chubarov Veronique Cremers Anjana Devi Viktor Drozd Liliya Elnikova Gloria Gottardi Kestutis Grigoras Dennis M. Hausmann Cheol Seong Hwang Shih-Hui Jen Tanja Kallio Jaana Kanervo Ivan Khmelnitskiy Do Han Kim Lev Klibanov Yury Koshtyal A. Outi I. Krause Jakob Kuhs Irina Kärkkänen Marja-Leena Kääriäinen Tommi Kääriäinen Luca Lamagna Adam A. Łapicki Markku Leskelä Harri Lipsanen Jussi Lyytinen Anatoly Malkov and Anatoly Malygin Abdelkader Mennad Christian Militzer Jyrki Molarius Małgorzata Norek Çağla Özgit-Akgün Mikhail Panov Henrik Pedersen Fabien Piallat Georgi Popov Riikka L. Puurunen Geert Rampelberg Robin H. A. Ras Erwan Rauwel Fred Roozeboom Timo Sajavaara Hossein Salami Hele Savin Nathanaelle Schneider Thomas E. Seidel Jonas Sundqvist Dmitry B. Suyatin Tobias Törndahl J. Ruud van Ommen Claudia Wiemer Oili M. E. Ylivaara Oksana Yurkevich,
    J. Vac. Sci. Technol. 2016, 35(1), 010801/1-010801/13.




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Publications 2011

  • Atomic Vapor Deposition Approach to In2O3 Thin Films
    M. Hellwig, H. Parala, J. Cybinksa, D. Barreca, A. Gasparotto, B. Niermann, H. -Werner Becker, D. Rogalla, J. Feydt, S. Irsen, A.V. Mudring, J. Winter, R. A. Fischer, A. Devi,
    J. Nanosci. and Nanotechnol. 2011, 9, 8094




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