New Publication
R.-M. Neubieser, J.-L. Wree, J. Jagosz, M. Becher, A. Ostendorf, A. Devi, C. Bock, M. Michel, A. GrabmaierLow-Temperature ALD Process Development of 200 mm wafer-scale MoS2 for Gas Sensing Application
Micro and Nano Engineering, Vol. 15, 100126 (2022)
Another successful study from our projects DFG-FlexMOS (SPP1796) and BMBF-FlexTMDSense on large-area and low-temperature deposition of molybdenum sulfide for potential gas sensing applications. A new manuscript is published in Micro and Nano Engineering. Further exciting research based on these promising results is established and will be part of our future publications to follow. The teams at RUB (IMC, LAT, MST) and Fraunhofer IMS (Duisburg) work with an interdiscplinary approach to exploit the potential of 2D materials for sensing applications.