New Publication in Eur. J. Mass Spectrometry
Electron impact mass spectrometry (EI-MS) is a valuable tool to characterize CVD/ALD precursors and it typically provides the molecular mass as well as decomposition pattern of precursors to elaborate on the stability of the molecules in the gas phase. However, for unstable and reactive precursors, EI-MS reaches its limits. As a promising alternative, liquid injection field desorption (LIFDI)-MS can reliably determine the masses of the molecular ions due to its very soft nature of ionization. In our new publication in Eur. J. Mass Spectrometry, we highlight the advantages of LIFDI-MS for characterizing labile and reactive CVD and ALD precursors.
