New Publication
CVD grown tungsten oxide for low temperature hydrogen gas sensors:Tuning surface characteristics via materials processing for sensing applications
A new tungsten precursor enabled the fabrication of nanostructured WO3 thin films via CVD at moderate process conditions. The metal oxide layers were integrated into interdigitated chemical sensor architecture and were found to be very appealing for hydrogen gas sensing at low temperatures. The WO3 layers were subjected to advanced characterization that includes LEEM, XPEEM and Synchrotron XPS and UPS to gain insights on the sensing properties towards hydrogen. These fundamental findings are timely and encouraging given the current and future need for hydrogen storage and its detection especially at low temperatures. This study includes the different research projects: FunALD (EFRE-FunALD), PICT2DES (BMBF-ForLab-Bochum) and FlexTMDSense (BMBF) which focusses on new precursors and chemical vapor deposition processes of functional materials for gas sensing. The joint interdisciplinary work was performed between RUB (IMC group) and Heinrich-Heine-University (HHUD).