New paper published in Small

New paper published in Small

We have a new paper published in Small.
This research topic led from the front by Lukas focused on a complete process chain starting from designing a Zn precursor, optimizing a PEALD processfor high-quality nanostructured ZnO followed by the application of the resulting ZnO thin films for dual applications. This includes its function as gas barrier layer (GBL) towards O₂ as well as gas sensor for the selective sensing of NO₂ .
The key to the development of a new ALD process for ZnO was the identification of a Zn precursor that is non-pyrophoric and can potentially substitute the pyrophoric diethylzinc commonly used in the industry. This research work was carried out in collaboration with research partners at RUB (Prof. Awakowicz and Dr. Bock), Heinrich-Heine Universität Düsseldorf (Dr. Ciftyurek and Prof. Schierbaum) and the industry partner paragon AG. The funding was through the EFRE (European Fund for Regional Development) project FunALD and the SFB-TR87 collaborative research center.