New project: Ultra-thin metal layers by plasma-assisted spatial atomic layer deposition at atmospheric pressure
The Inorganic Materials Chemistry (IMC) at RUB together with the collaborators from the Bergische University Wuppertal (BUW) in Germany have been granted 600k Euros by the German Research Foundation (DFG) for a new research project which will focus on atomic layer deposition of coinage metals like silver and copper. The project entitled “Ultra-thin metal layers by plasma-assisted spatial atomic layer deposition at atmospheric pressure will include developing new metalorganic precursors for silver and copper which will be performed at IMC (RUB) and the process development for thin and transparent thin films at atmospheric pressure will be carried out in BUW in the group of Prof. Thomas Riedl.For more information:
Press report (in german language)
Recent publication from our group